Chemnitz University of Technology – Center for Micro and Nano Technologies (ZfM)

The Center for Micro and Nano Technologies is a scientific research unit of the Faculty of Electrical Engineering and Information Technology at Chemnitz University of Technology. It is a reliable partner in basic research, R&D projects and direct research and development contracts for industry. The current focus of our research fields is on:

  • 1D/2D Nanodevices
  • MEMS Technologies and Devices
  • Advanced Micro and Nano Patterning 
  • Spintronics and Interconnect Systems
  • Simulations in Nano Technology
  • Molecular-based micro and nano systems
  • Photonics/MOEMS
  • Nano-Packaging
  • Miniaturized plasma systems
  • Digital Twins in Semiconductor Production

The Center for Micro and Nano Technologies has clean rooms with an area of about 1000 m² (300 m² of which are clean room class ISO 4) and the corresponding equipment for processing and characterization of wafers with diameters of 100 mm, 150mm and 200mm. A modern and extensive infrastructure with industry-related processes enables smallest structure dimensions down to 20 nm for nanostructuring. 

Services:

  • Development of material, technology and functional demonstrators
  • Manufacturing of prototypes and small series 
  • Technology transfer to customers or foundries 
  • Education of students and PhD students

General Information

Chemnitz University of Technology – Center for Micro and Nano Technologies (ZfM)
IVAM member
Reichenhainer Straße 70
09126 Chemnitz
Germany
Number of Employees: 120
Founding Year: 1991

Contact

Prof. Dr. Karla Hiller
Senior Scientist for MEMS and optical Technologies
+49 371 531 33276
Dr. Jörg Schuster
Senior Scientist for Process and Device Simulation
+49 371 531 33013
Dr. Danny Reuter
Senior Scientist for Micro and Nano Technologies and Devices
+49 371 531 35041
Dr. Maik Wiemer
Senior Scientist for MMEMS Packaging and Wafer Level Packaging
+49 371 531 36654