SPS-Europe B.V.

6th NRW Nano-Conference

For nearly 30 years SPS-Europe offers quality service & products as a one-stop solutions-provider for all process steps for front-end semiconductor manufacturing. We supply a range of industry leading products used worldwide for substrate handling and shipping, wet processing and CMP, photolithography, and OEM replacement parts. Based on our extensive technical process application knowledge we develop customized solutions for our customers, and offer fast supply.

Products

• POLOS/SPIN150i manual or semi-automatic spin processors for thin film
• ANRIC ALD table-top atomic layer deposition system
• H-Square substrate handling products
• Midas submicron mask aligners and UV lightsources
• Heateflex high-purity fluid heating
• Pillar chemical pumps
• Malema flow control products
• ePAK wafer storage and shipping boxes for semiconductor wafers and solar industry

Services

• Chemical pump maintenance
• SAT or SRD tool refurbishment