IVAM Microtechnology Network
Halle F, Stand FN-22
Heidelberg Instruments is a world leader in the development and production of high precision laser lithography systems, maskless aligners and nanofabrication tools. With 40 years of experience and an installation base of more than 1,400 systems worldwide at industrial customers and in academic facilities, we provide lithography solutions specifically tailored to meet all micro- and nanofabrication requirements of our customers. Industry leaders in the fields of MEMS, BioMEMS, ASICS, TFT, displays, micro-optics, sensors, semiconductors/advanced packaging and automotive are among our customers.
